NANO 212 - Basic Nanotechnology Processes

(3 credits)

Taught at The Pennsylvania State University - University Park Campus. Overview of the broad spectrum of processing approaches involved in “top down”, “bottom up”, and hybrid nanofabrication. The course details a step-by-step description of the equipment, facilities processes, and process flows used in today’s device and structure fabrication. Students learn to appreciate processing and manufacturing concerns including safety, process control, contamination, yield, and processing interaction. The students design process flows for micro- and nano-scale systems. Students learn the similarities and differences in “top down” and “bottom up” equipment and process flows by undertaking hands-on processing. This hands-on overview exposure covers basic nanofabrication processes including deposition, etching, and pattern transfer. Prerequisite(s): BIOL 111, CHEM 122, PHYS 121, and MATH 122. Spring and Summer.